JPH0330896U - - Google Patents

Info

Publication number
JPH0330896U
JPH0330896U JP1989090426U JP9042689U JPH0330896U JP H0330896 U JPH0330896 U JP H0330896U JP 1989090426 U JP1989090426 U JP 1989090426U JP 9042689 U JP9042689 U JP 9042689U JP H0330896 U JPH0330896 U JP H0330896U
Authority
JP
Japan
Prior art keywords
mark
positioning
positional deviation
amount
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989090426U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989090426U priority Critical patent/JPH0330896U/ja
Publication of JPH0330896U publication Critical patent/JPH0330896U/ja
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Landscapes

  • Control Of Position Or Direction (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
JP1989090426U 1989-08-02 1989-08-02 Pending JPH0330896U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989090426U JPH0330896U (en]) 1989-08-02 1989-08-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989090426U JPH0330896U (en]) 1989-08-02 1989-08-02

Publications (1)

Publication Number Publication Date
JPH0330896U true JPH0330896U (en]) 1991-03-26

Family

ID=31639947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989090426U Pending JPH0330896U (en]) 1989-08-02 1989-08-02

Country Status (1)

Country Link
JP (1) JPH0330896U (en])

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